Development of a Schwarzschild type X-ray microscope.
نویسندگان
چکیده
منابع مشابه
First stage in the development of a soft-x-ray reflection imaging microscope in the Schwarzschild configuration using a soft-x-ray laser at 18.2 nm.
The main interest in developing a soft-x-ray reflection imaging microscope is its potential application to the high-resolution inspection of lithographic products and the observation of surfaces (or membranes) of biological cells. Significant efforts are being made in the United States and elsewhere to produce integrated circuits with a 0.25-,um feature size, which is resulting in an increased ...
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ژورنال
عنوان ژورنال: The Review of Laser Engineering
سال: 1990
ISSN: 0387-0200,1349-6603
DOI: 10.2184/lsj.18.11_938